UV-LED EXPOSURE : UV‑KUB 1-9
COLD UV-LED CURING SYSTEM
The UV-LED exposure system UV-KUB benefits from a cold UV source based on UV-LEDs, for which the source is formed by UV-LEDs emiting at 365nm in standard configuration. Emiting sources at 385nm, 395nm or 405 nm are also available on demand. The monochromatic illumination, powered at 35mW/cm², is +/- 10% homogeneous over a whole 4 inches diameter up to 9 inches working surface.
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Kloé company has paid particular attention to the unique and specific optical processing chainbased on its broad experience in this field.
The collimated system of the UV LEDs that equips the UV-KUB 2 enables to benefit from an homogeneous exposure better than 5% of variation over the 4 inches working surface.
The angle of divergence of the UV light source is less than 2°. Therefore the fabrication of patterns with less than 2µm of resolution and with excellent verticality of edges on thick layers is guaranteed.
First compact system with UV-LED
The mask aligner UV-KUB 3 is the first mask alignement system equipped with a UV-LED source on the international market.
The UV-KUB 3 is a laboratory equipment particularly suited for the production of microfluidic systems, microelectronics and optical ntegrated circuits through photolithography. Its design makes possible the realization of microstructures below 2 µm over the entire 4″ work surface with an alignment precision of less than 3 µm.
Boasting the latest advances in UV-LED exposure technology from the UV-KUB 2, the illumination source of the UV-KUB 3 is devoid of undesirable thermal effects and is perfectly monochromatic. The lifetime of the LEDs (> 10000h) which form the UV source makes it a reliable equipment and requires no specific maintenance.
Beyond its size reduced to a minimum, its internal supporting structure dispenses the need for anti-vibration table, combined with low power consumption, the UV-KUB 3 is the ideal tool to control the operating costs.
Fully secure thanks to its dust-proof hood, this equipment is the only solution on the market that democratizes precision photolithography without requiring a cleanroom type environment.
ADHESIVE CURING : K‑ILU 1 AND 2
UV-LED system for small surface
The adhesive curing system, the K-ILU is an UV-LED adhesive curing, either keyboard controlled (K-ILU version 1) or touchscreen controlled (K-ILU version 2), offering continuous or flashing programmable curing modes.
The integrated cold-UV concept ensures very low-stress bondings, essential to any pigtailing and optical assembling processes.
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